1/12/2011	12:15:08 AM	H2 valve closed
1/12/2011	12:15:08 AM	BCl3 valve closed
1/12/2011	12:15:08 AM	PH3 valve closed
1/12/2011	12:15:08 AM	SiCl4 pre valve closed
1/12/2011	12:15:08 AM	SiCl4 post valve closed
1/12/2011	12:15:08 AM	Main Vac valve closed
1/12/2011	12:15:08 AM	Bypass valve closed
1/12/2011	12:15:08 AM	Helium valve opened
1/12/2011	12:15:08 AM	Bubbler valve opened
1/12/2011	12:15:08 AM	Helium MFC set to  500.000000
1/12/2011	12:15:08 AM	H2 MFC set to  0.000000
1/12/2011	12:15:08 AM	BCl3 MFC set to  0.000000
1/12/2011	12:15:08 AM	PHl3 MFC set to  0.000000
1/12/2011	12:15:08 AM	SiCl4 MFC set to  0.000000
1/12/2011	12:15:08 AM	Bypass solenoid MFC set to  0.000000
1/12/2011	12:15:08 AM	Tube furnace set to 0
1/12/2011	12:35:08 AM	Helium valve closed
1/12/2011	12:35:08 AM	H2 valve closed
1/12/2011	12:35:08 AM	BCl3 valve closed
1/12/2011	12:35:08 AM	PH3 valve closed
1/12/2011	12:35:08 AM	SiCl4 pre valve closed
1/12/2011	12:35:08 AM	SiCl4 post valve closed
1/12/2011	12:35:08 AM	Main Vac valve closed
1/12/2011	12:35:08 AM	Bypass valve closed
1/12/2011	12:35:08 AM	Bubbler valve closed
1/12/2011	12:35:08 AM	Helium MFC set to  0.000000
1/12/2011	12:35:08 AM	H2 MFC set to  0.000000
1/12/2011	12:35:08 AM	BCl3 MFC set to  0.000000
1/12/2011	12:35:08 AM	PHl3 MFC set to  0.000000
1/12/2011	12:35:08 AM	SiCl4 MFC set to  0.000000
1/12/2011	12:35:08 AM	Bypass solenoid MFC set to  0.000000
1/12/2011	12:35:08 AM	Tube furnace set to 0
1/12/2011	12:35:09 AM	Run finished at 12:35 AM
1/12/2011	3:47:47 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/12/2011	3:47:48 AM	Recipe started at 3:47 AM
1/12/2011	3:47:48 AM	Helium valve closed
1/12/2011	3:47:48 AM	H2 valve closed
1/12/2011	3:47:48 AM	BCl3 valve closed
1/12/2011	3:47:48 AM	PH3 valve closed
1/12/2011	3:47:48 AM	SiCl4 pre valve closed
1/12/2011	3:47:48 AM	SiCl4 post valve closed
1/12/2011	3:47:48 AM	Main Vac valve closed
1/12/2011	3:47:48 AM	Bubbler valve closed
1/12/2011	3:47:48 AM	Bypass valve opened
1/12/2011	3:47:48 AM	Helium MFC set to  0.000000
1/12/2011	3:47:48 AM	H2 MFC set to  0.000000
1/12/2011	3:47:48 AM	BCl3 MFC set to  0.000000
1/12/2011	3:47:48 AM	PHl3 MFC set to  0.000000
1/12/2011	3:47:48 AM	SiCl4 MFC set to  0.000000
1/12/2011	3:47:48 AM	Bypass solenoid MFC set to  0.000000
1/12/2011	3:47:48 AM	Tube furnace set to 0
1/12/2011	3:48:20 AM	Helium valve closed
1/12/2011	3:48:20 AM	H2 valve closed
1/12/2011	3:48:20 AM	BCl3 valve closed
1/12/2011	3:48:20 AM	PH3 valve closed
1/12/2011	3:48:20 AM	SiCl4 pre valve closed
1/12/2011	3:48:20 AM	SiCl4 post valve closed
1/12/2011	3:48:20 AM	Bubbler valve closed
1/12/2011	3:48:20 AM	Main Vac valve opened
1/12/2011	3:48:20 AM	Bypass valve opened
1/12/2011	3:48:20 AM	Helium MFC set to  0.000000
1/12/2011	3:48:20 AM	H2 MFC set to  0.000000
1/12/2011	3:48:20 AM	BCl3 MFC set to  0.000000
1/12/2011	3:48:20 AM	PHl3 MFC set to  0.000000
1/12/2011	3:48:20 AM	SiCl4 MFC set to  0.000000
1/12/2011	3:48:20 AM	Bypass solenoid MFC set to  0.000000
1/12/2011	3:48:20 AM	Tube furnace set to 0
1/12/2011	3:48:20 AM	Run finished at 3:48 AM
1/12/2011	3:48:20 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/12/2011	4:03:13 AM	Recipe started at 4:03 AM
1/12/2011	4:03:13 AM	Helium valve closed
1/12/2011	4:03:13 AM	BCl3 valve closed
1/12/2011	4:03:13 AM	PH3 valve closed
1/12/2011	4:03:13 AM	SiCl4 pre valve closed
1/12/2011	4:03:13 AM	SiCl4 post valve closed
1/12/2011	4:03:13 AM	Main Vac valve closed
1/12/2011	4:03:13 AM	Bypass valve closed
1/12/2011	4:03:13 AM	Bubbler valve closed
1/12/2011	4:03:13 AM	H2 valve opened
1/12/2011	4:03:13 AM	Helium MFC set to  0.000000
1/12/2011	4:03:13 AM	H2 MFC set to  500.000000
1/12/2011	4:03:13 AM	BCl3 MFC set to  0.000000
1/12/2011	4:03:13 AM	PHl3 MFC set to  0.000000
1/12/2011	4:03:13 AM	SiCl4 MFC set to  0.000000
1/12/2011	4:03:13 AM	Bypass solenoid MFC set to  0.000000
1/12/2011	4:03:13 AM	Tube furnace set to 0
1/12/2011	4:04:36 AM	Helium valve closed
1/12/2011	4:04:36 AM	BCl3 valve closed
1/12/2011	4:04:36 AM	PH3 valve closed
1/12/2011	4:04:36 AM	SiCl4 pre valve closed
1/12/2011	4:04:36 AM	SiCl4 post valve closed
1/12/2011	4:04:36 AM	Main Vac valve closed
1/12/2011	4:04:36 AM	Bypass valve closed
1/12/2011	4:04:36 AM	H2 valve opened
1/12/2011	4:04:36 AM	Bubbler valve opened
1/12/2011	4:04:36 AM	Helium MFC set to  0.000000
1/12/2011	4:04:36 AM	H2 MFC set to  500.000000
1/12/2011	4:04:36 AM	BCl3 MFC set to  0.000000
1/12/2011	4:04:36 AM	PHl3 MFC set to  0.000000
1/12/2011	4:04:36 AM	SiCl4 MFC set to  0.000000
1/12/2011	4:04:36 AM	Bypass solenoid MFC set to  0.000000
1/12/2011	4:04:36 AM	Tube furnace set to 1000
1/12/2011	4:24:36 AM	Helium valve closed
1/12/2011	4:24:36 AM	PH3 valve closed
1/12/2011	4:24:36 AM	Main Vac valve closed
1/12/2011	4:24:36 AM	Bypass valve closed
1/12/2011	4:24:36 AM	H2 valve opened
1/12/2011	4:24:36 AM	BCl3 valve opened
1/12/2011	4:24:36 AM	SiCl4 pre valve opened
1/12/2011	4:24:36 AM	SiCl4 post valve opened
1/12/2011	4:24:36 AM	Bubbler valve opened
1/12/2011	4:24:36 AM	Helium MFC set to  0.000000
1/12/2011	4:24:36 AM	H2 MFC set to  500.000000
1/12/2011	4:24:36 AM	BCl3 MFC set to  3.000000
1/12/2011	4:24:36 AM	PHl3 MFC set to  0.000000
1/12/2011	4:24:36 AM	SiCl4 MFC set to  50.000000
1/12/2011	4:24:36 AM	Bypass solenoid MFC set to  0.000000
1/12/2011	4:24:36 AM	Tube furnace set to 1000
1/12/2011	4:54:37 AM	H2 valve closed
1/12/2011	4:54:37 AM	BCl3 valve closed
1/12/2011	4:54:37 AM	PH3 valve closed
1/12/2011	4:54:37 AM	SiCl4 pre valve closed
1/12/2011	4:54:37 AM	SiCl4 post valve closed
1/12/2011	4:54:37 AM	Main Vac valve closed
1/12/2011	4:54:37 AM	Bypass valve closed
1/12/2011	4:54:37 AM	Helium valve opened
1/12/2011	4:54:37 AM	Bubbler valve opened
1/12/2011	4:54:37 AM	Helium MFC set to  500.000000
1/12/2011	4:54:37 AM	H2 MFC set to  0.000000
1/12/2011	4:54:37 AM	BCl3 MFC set to  0.000000
1/12/2011	4:54:37 AM	PHl3 MFC set to  0.000000
1/12/2011	4:54:37 AM	SiCl4 MFC set to  0.000000
1/12/2011	4:54:37 AM	Bypass solenoid MFC set to  0.000000
1/12/2011	4:54:37 AM	Tube furnace set to 0
1/12/2011	5:04:56 AM	Helium valve closed
1/12/2011	5:04:56 AM	H2 valve closed
1/12/2011	5:04:56 AM	BCl3 valve closed
1/12/2011	5:04:56 AM	PH3 valve closed
1/12/2011	5:04:56 AM	SiCl4 pre valve closed
1/12/2011	5:04:56 AM	SiCl4 post valve closed
1/12/2011	5:04:56 AM	Main Vac valve closed
1/12/2011	5:04:56 AM	Bypass valve closed
1/12/2011	5:04:56 AM	Bubbler valve closed
1/12/2011	5:04:56 AM	Helium MFC set to  0.000000
1/12/2011	5:04:56 AM	H2 MFC set to  0.000000
1/12/2011	5:04:56 AM	BCl3 MFC set to  0.000000
1/12/2011	5:04:56 AM	PHl3 MFC set to  0.000000
1/12/2011	5:04:56 AM	SiCl4 MFC set to  0.000000
1/12/2011	5:04:56 AM	Bypass solenoid MFC set to  0.000000
1/12/2011	5:04:56 AM	Tube furnace set to 0
1/12/2011	5:04:56 AM	Run finished at 5:04 AM
1/12/2011	5:07:45 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/12/2011	5:07:45 AM	Recipe started at 5:07 AM
1/12/2011	5:07:45 AM	Helium valve closed
1/12/2011	5:07:45 AM	H2 valve closed
1/12/2011	5:07:45 AM	BCl3 valve closed
1/12/2011	5:07:45 AM	PH3 valve closed
1/12/2011	5:07:45 AM	SiCl4 pre valve closed
1/12/2011	5:07:45 AM	SiCl4 post valve closed
1/12/2011	5:07:45 AM	Main Vac valve closed
1/12/2011	5:07:45 AM	Bubbler valve closed
1/12/2011	5:07:45 AM	Bypass valve opened
1/12/2011	5:07:45 AM	Helium MFC set to  0.000000
1/12/2011	5:07:45 AM	H2 MFC set to  0.000000
1/12/2011	5:07:45 AM	BCl3 MFC set to  0.000000
1/12/2011	5:07:45 AM	PHl3 MFC set to  0.000000
1/12/2011	5:07:45 AM	SiCl4 MFC set to  0.000000
1/12/2011	5:07:45 AM	Bypass solenoid MFC set to  0.000000
1/12/2011	5:07:46 AM	Tube furnace set to 0
1/12/2011	5:08:15 AM	Helium valve closed
1/12/2011	5:08:15 AM	H2 valve closed
1/12/2011	5:08:15 AM	BCl3 valve closed
1/12/2011	5:08:15 AM	PH3 valve closed
1/12/2011	5:08:15 AM	SiCl4 pre valve closed
1/12/2011	5:08:15 AM	SiCl4 post valve closed
1/12/2011	5:08:15 AM	Bubbler valve closed
1/12/2011	5:08:15 AM	Main Vac valve opened
1/12/2011	5:08:15 AM	Bypass valve opened
1/12/2011	5:08:15 AM	Helium MFC set to  0.000000
1/12/2011	5:08:15 AM	H2 MFC set to  0.000000
1/12/2011	5:08:15 AM	BCl3 MFC set to  0.000000
1/12/2011	5:08:15 AM	PHl3 MFC set to  0.000000
1/12/2011	5:08:15 AM	SiCl4 MFC set to  0.000000
1/12/2011	5:08:15 AM	Bypass solenoid MFC set to  0.000000
1/12/2011	5:08:15 AM	Tube furnace set to 0
1/12/2011	5:08:16 AM	Run finished at 5:08 AM
1/12/2011	5:08:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/12/2011	9:48:17 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/12/2011	9:48:18 AM	Recipe started at 9:48 AM
1/12/2011	9:48:18 AM	H2 valve closed
1/12/2011	9:48:18 AM	BCl3 valve closed
1/12/2011	9:48:18 AM	PH3 valve closed
1/12/2011	9:48:18 AM	SiCl4 pre valve closed
1/12/2011	9:48:18 AM	SiCl4 post valve closed
1/12/2011	9:48:18 AM	Main Vac valve closed
1/12/2011	9:48:18 AM	Bypass valve closed
1/12/2011	9:48:18 AM	Bubbler valve closed
1/12/2011	9:48:18 AM	Helium valve opened
1/12/2011	9:48:18 AM	Helium MFC set to  500.000000
1/12/2011	9:48:18 AM	H2 MFC set to  0.000000
1/12/2011	9:48:18 AM	BCl3 MFC set to  0.000000
1/12/2011	9:48:18 AM	PHl3 MFC set to  0.000000
1/12/2011	9:48:18 AM	SiCl4 MFC set to  0.000000
1/12/2011	9:48:18 AM	Bypass solenoid MFC set to  0.000000
1/12/2011	9:48:18 AM	Tube furnace set to 0
1/12/2011	9:49:37 AM	Helium valve closed
1/12/2011	9:49:37 AM	H2 valve closed
1/12/2011	9:49:37 AM	BCl3 valve closed
1/12/2011	9:49:37 AM	PH3 valve closed
1/12/2011	9:49:37 AM	SiCl4 pre valve closed
1/12/2011	9:49:37 AM	SiCl4 post valve closed
1/12/2011	9:49:37 AM	Main Vac valve closed
1/12/2011	9:49:37 AM	Bypass valve closed
1/12/2011	9:49:37 AM	Bubbler valve closed
1/12/2011	9:49:37 AM	Helium MFC set to  0.000000
1/12/2011	9:49:37 AM	H2 MFC set to  0.000000
1/12/2011	9:49:37 AM	BCl3 MFC set to  0.000000
1/12/2011	9:49:37 AM	PHl3 MFC set to  0.000000
1/12/2011	9:49:37 AM	SiCl4 MFC set to  0.000000
1/12/2011	9:49:37 AM	Bypass solenoid MFC set to  0.000000
1/12/2011	9:49:37 AM	Tube furnace set to 0
1/12/2011	9:49:38 AM	Run finished at 9:49 AM
1/12/2011	9:49:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/12/2011	9:57:04 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/12/2011	9:57:05 AM	Recipe started at 9:57 AM
1/12/2011	9:57:05 AM	Helium valve closed
1/12/2011	9:57:05 AM	H2 valve closed
1/12/2011	9:57:05 AM	BCl3 valve closed
1/12/2011	9:57:05 AM	PH3 valve closed
1/12/2011	9:57:05 AM	SiCl4 pre valve closed
1/12/2011	9:57:05 AM	SiCl4 post valve closed
1/12/2011	9:57:05 AM	Main Vac valve closed
1/12/2011	9:57:05 AM	Bubbler valve closed
1/12/2011	9:57:05 AM	Bypass valve opened
1/12/2011	9:57:05 AM	Helium MFC set to  0.000000
1/12/2011	9:57:05 AM	H2 MFC set to  0.000000
1/12/2011	9:57:05 AM	BCl3 MFC set to  0.000000
1/12/2011	9:57:05 AM	PHl3 MFC set to  0.000000
1/12/2011	9:57:05 AM	SiCl4 MFC set to  0.000000
1/12/2011	9:57:05 AM	Bypass solenoid MFC set to  0.000000
1/12/2011	9:57:05 AM	Tube furnace set to 0
1/12/2011	9:57:36 AM	Helium valve closed
1/12/2011	9:57:36 AM	H2 valve closed
1/12/2011	9:57:36 AM	BCl3 valve closed
1/12/2011	9:57:36 AM	PH3 valve closed
1/12/2011	9:57:36 AM	SiCl4 pre valve closed
1/12/2011	9:57:36 AM	SiCl4 post valve closed
1/12/2011	9:57:36 AM	Bubbler valve closed
1/12/2011	9:57:36 AM	Main Vac valve opened
1/12/2011	9:57:36 AM	Bypass valve opened
1/12/2011	9:57:36 AM	Helium MFC set to  0.000000
1/12/2011	9:57:36 AM	H2 MFC set to  0.000000
1/12/2011	9:57:36 AM	BCl3 MFC set to  0.000000
1/12/2011	9:57:36 AM	PHl3 MFC set to  0.000000
1/12/2011	9:57:36 AM	SiCl4 MFC set to  0.000000
1/12/2011	9:57:36 AM	Bypass solenoid MFC set to  0.000000
1/12/2011	9:57:36 AM	Tube furnace set to 0
1/12/2011	9:57:37 AM	Run finished at 9:57 AM
1/12/2011	9:57:37 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/12/2011	10:07:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/12/2011	10:07:28 AM	Recipe started at 10:07 AM
1/12/2011	10:07:28 AM	H2 valve closed
1/12/2011	10:07:28 AM	BCl3 valve closed
1/12/2011	10:07:28 AM	PH3 valve closed
1/12/2011	10:07:28 AM	SiCl4 pre valve closed
1/12/2011	10:07:28 AM	SiCl4 post valve closed
1/12/2011	10:07:28 AM	Main Vac valve closed
1/12/2011	10:07:28 AM	Bypass valve closed
1/12/2011	10:07:28 AM	Bubbler valve closed
1/12/2011	10:07:28 AM	Helium valve opened
1/12/2011	10:07:28 AM	Helium MFC set to  500.000000
1/12/2011	10:07:28 AM	H2 MFC set to  0.000000
1/12/2011	10:07:28 AM	BCl3 MFC set to  0.000000
1/12/2011	10:07:28 AM	PHl3 MFC set to  0.000000
1/12/2011	10:07:28 AM	SiCl4 MFC set to  0.000000
1/12/2011	10:07:28 AM	Bypass solenoid MFC set to  0.000000
1/12/2011	10:07:29 AM	Tube furnace set to 0
1/12/2011	10:08:50 AM	Helium valve closed
1/12/2011	10:08:50 AM	H2 valve closed
1/12/2011	10:08:50 AM	BCl3 valve closed
1/12/2011	10:08:50 AM	PH3 valve closed
1/12/2011	10:08:50 AM	SiCl4 pre valve closed
1/12/2011	10:08:50 AM	SiCl4 post valve closed
1/12/2011	10:08:50 AM	Main Vac valve closed
1/12/2011	10:08:50 AM	Bypass valve closed
1/12/2011	10:08:50 AM	Bubbler valve closed
1/12/2011	10:08:50 AM	Helium MFC set to  0.000000
1/12/2011	10:08:50 AM	H2 MFC set to  0.000000
1/12/2011	10:08:50 AM	BCl3 MFC set to  0.000000
1/12/2011	10:08:50 AM	PHl3 MFC set to  0.000000
1/12/2011	10:08:50 AM	SiCl4 MFC set to  0.000000
1/12/2011	10:08:50 AM	Bypass solenoid MFC set to  0.000000
1/12/2011	10:08:50 AM	Tube furnace set to 0
1/12/2011	10:08:50 AM	Run finished at 10:08 AM
1/12/2011	10:08:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/12/2011	10:12:50 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/12/2011	10:12:51 AM	Recipe started at 10:12 AM
1/12/2011	10:12:51 AM	Helium valve closed
1/12/2011	10:12:51 AM	H2 valve closed
1/12/2011	10:12:51 AM	BCl3 valve closed
1/12/2011	10:12:51 AM	PH3 valve closed
1/12/2011	10:12:51 AM	SiCl4 pre valve closed
1/12/2011	10:12:51 AM	SiCl4 post valve closed
1/12/2011	10:12:51 AM	Main Vac valve closed
1/12/2011	10:12:51 AM	Bubbler valve closed
1/12/2011	10:12:51 AM	Bypass valve opened
1/12/2011	10:12:51 AM	Helium MFC set to  0.000000
1/12/2011	10:12:51 AM	H2 MFC set to  0.000000
1/12/2011	10:12:51 AM	BCl3 MFC set to  0.000000
1/12/2011	10:12:51 AM	PHl3 MFC set to  0.000000
1/12/2011	10:12:51 AM	SiCl4 MFC set to  0.000000
1/12/2011	10:12:51 AM	Bypass solenoid MFC set to  0.000000
1/12/2011	10:12:51 AM	Tube furnace set to 0
1/12/2011	10:13:22 AM	Helium valve closed
1/12/2011	10:13:22 AM	H2 valve closed
1/12/2011	10:13:22 AM	BCl3 valve closed
1/12/2011	10:13:22 AM	PH3 valve closed
1/12/2011	10:13:22 AM	SiCl4 pre valve closed
1/12/2011	10:13:22 AM	SiCl4 post valve closed
1/12/2011	10:13:22 AM	Bubbler valve closed
1/12/2011	10:13:22 AM	Main Vac valve opened
1/12/2011	10:13:22 AM	Bypass valve opened
1/12/2011	10:13:22 AM	Helium MFC set to  0.000000
1/12/2011	10:13:22 AM	H2 MFC set to  0.000000
1/12/2011	10:13:22 AM	BCl3 MFC set to  0.000000
1/12/2011	10:13:22 AM	PHl3 MFC set to  0.000000
1/12/2011	10:13:22 AM	SiCl4 MFC set to  0.000000
1/12/2011	10:13:22 AM	Bypass solenoid MFC set to  0.000000
1/12/2011	10:13:22 AM	Tube furnace set to 0
1/12/2011	10:13:23 AM	Run finished at 10:13 AM
1/12/2011	10:13:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/12/2011	10:13:50 AM	Helium MFC set to  10.000000
1/12/2011	10:13:51 AM	Helium valve opened
1/12/2011	10:35:20 AM	Helium valve closed
1/12/2011	10:36:41 AM	Helium valve opened
1/12/2011	10:48:21 AM	Helium valve closed
1/12/2011	10:49:34 AM	Helium valve opened
1/12/2011	10:55:51 AM	Helium valve closed
1/12/2011	10:58:43 AM	Recipe started at 10:58 AM
1/12/2011	10:58:43 AM	Helium valve closed
1/12/2011	10:58:43 AM	BCl3 valve closed
1/12/2011	10:58:43 AM	PH3 valve closed
1/12/2011	10:58:43 AM	SiCl4 pre valve closed
1/12/2011	10:58:43 AM	SiCl4 post valve closed
1/12/2011	10:58:43 AM	Main Vac valve closed
1/12/2011	10:58:43 AM	Bypass valve closed
1/12/2011	10:58:43 AM	Bubbler valve closed
1/12/2011	10:58:43 AM	H2 valve opened
1/12/2011	10:58:43 AM	Helium MFC set to  0.000000
1/12/2011	10:58:43 AM	H2 MFC set to  500.000000
1/12/2011	10:58:43 AM	BCl3 MFC set to  0.000000
1/12/2011	10:58:43 AM	PHl3 MFC set to  0.000000
1/12/2011	10:58:43 AM	SiCl4 MFC set to  0.000000
1/12/2011	10:58:43 AM	Bypass solenoid MFC set to  0.000000
1/12/2011	10:58:43 AM	Tube furnace set to 0
1/12/2011	11:00:07 AM	Helium valve closed
1/12/2011	11:00:07 AM	BCl3 valve closed
1/12/2011	11:00:07 AM	PH3 valve closed
1/12/2011	11:00:07 AM	SiCl4 pre valve closed
1/12/2011	11:00:07 AM	SiCl4 post valve closed
1/12/2011	11:00:07 AM	Main Vac valve closed
1/12/2011	11:00:07 AM	Bypass valve closed
1/12/2011	11:00:07 AM	H2 valve opened
1/12/2011	11:00:07 AM	Bubbler valve opened
1/12/2011	11:00:07 AM	Helium MFC set to  0.000000
1/12/2011	11:00:07 AM	H2 MFC set to  500.000000
1/12/2011	11:00:07 AM	BCl3 MFC set to  0.000000
1/12/2011	11:00:07 AM	PHl3 MFC set to  0.000000
1/12/2011	11:00:07 AM	SiCl4 MFC set to  0.000000
1/12/2011	11:00:07 AM	Bypass solenoid MFC set to  0.000000
1/12/2011	11:00:07 AM	Tube furnace set to 1000
1/12/2011	11:20:07 AM	Helium valve closed
1/12/2011	11:20:07 AM	BCl3 valve closed
1/12/2011	11:20:07 AM	PH3 valve closed
1/12/2011	11:20:07 AM	Main Vac valve closed
1/12/2011	11:20:07 AM	Bypass valve closed
1/12/2011	11:20:07 AM	H2 valve opened
1/12/2011	11:20:07 AM	SiCl4 pre valve opened
1/12/2011	11:20:07 AM	SiCl4 post valve opened
1/12/2011	11:20:07 AM	Bubbler valve opened
1/12/2011	11:20:07 AM	Helium MFC set to  0.000000
1/12/2011	11:20:07 AM	H2 MFC set to  500.000000
1/12/2011	11:20:07 AM	BCl3 MFC set to  0.000000
1/12/2011	11:20:07 AM	PHl3 MFC set to  0.000000
1/12/2011	11:20:07 AM	SiCl4 MFC set to  50.000000
1/12/2011	11:20:07 AM	Bypass solenoid MFC set to  0.000000
1/12/2011	11:20:07 AM	Tube furnace set to 1000
1/12/2011	11:40:07 AM	H2 valve closed
1/12/2011	11:40:07 AM	BCl3 valve closed
1/12/2011	11:40:07 AM	PH3 valve closed
1/12/2011	11:40:07 AM	SiCl4 pre valve closed
1/12/2011	11:40:07 AM	SiCl4 post valve closed
1/12/2011	11:40:07 AM	Main Vac valve closed
1/12/2011	11:40:07 AM	Bypass valve closed
1/12/2011	11:40:07 AM	Helium valve opened
1/12/2011	11:40:07 AM	Bubbler valve opened
1/12/2011	11:40:07 AM	Helium MFC set to  500.000000
1/12/2011	11:40:07 AM	H2 MFC set to  0.000000
1/12/2011	11:40:07 AM	BCl3 MFC set to  0.000000
1/12/2011	11:40:07 AM	PHl3 MFC set to  0.000000
1/12/2011	11:40:07 AM	SiCl4 MFC set to  0.000000
1/12/2011	11:40:07 AM	Bypass solenoid MFC set to  0.000000
1/12/2011	11:40:07 AM	Tube furnace set to 0
1/12/2011	12:16:47 PM	Helium valve closed
1/12/2011	12:16:47 PM	H2 valve closed
1/12/2011	12:16:47 PM	BCl3 valve closed
1/12/2011	12:16:47 PM	PH3 valve closed
1/12/2011	12:16:47 PM	SiCl4 pre valve closed
1/12/2011	12:16:47 PM	SiCl4 post valve closed
1/12/2011	12:16:47 PM	Main Vac valve closed
1/12/2011	12:16:47 PM	Bypass valve closed
1/12/2011	12:16:47 PM	Bubbler valve closed
1/12/2011	12:16:47 PM	Helium MFC set to  0.000000
1/12/2011	12:16:47 PM	H2 MFC set to  0.000000
1/12/2011	12:16:47 PM	BCl3 MFC set to  0.000000
1/12/2011	12:16:47 PM	PHl3 MFC set to  0.000000
1/12/2011	12:16:47 PM	SiCl4 MFC set to  0.000000
1/12/2011	12:16:47 PM	Bypass solenoid MFC set to  0.000000
1/12/2011	12:16:48 PM	Tube furnace set to 0
1/12/2011	12:16:48 PM	Run finished at 12:16 PM
1/12/2011	12:24:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/12/2011	12:24:18 PM	Recipe started at 12:24 PM
1/12/2011	12:24:18 PM	Helium valve closed
1/12/2011	12:24:18 PM	H2 valve closed
1/12/2011	12:24:18 PM	BCl3 valve closed
1/12/2011	12:24:18 PM	PH3 valve closed
1/12/2011	12:24:18 PM	SiCl4 pre valve closed
1/12/2011	12:24:18 PM	SiCl4 post valve closed
1/12/2011	12:24:18 PM	Main Vac valve closed
1/12/2011	12:24:18 PM	Bubbler valve closed
1/12/2011	12:24:18 PM	Bypass valve opened
1/12/2011	12:24:18 PM	Helium MFC set to  0.000000
1/12/2011	12:24:18 PM	H2 MFC set to  0.000000
1/12/2011	12:24:18 PM	BCl3 MFC set to  0.000000
1/12/2011	12:24:18 PM	PHl3 MFC set to  0.000000
1/12/2011	12:24:18 PM	SiCl4 MFC set to  0.000000
1/12/2011	12:24:18 PM	Bypass solenoid MFC set to  0.000000
1/12/2011	12:24:18 PM	Tube furnace set to 0
1/12/2011	12:24:51 PM	Helium valve closed
1/12/2011	12:24:51 PM	H2 valve closed
1/12/2011	12:24:51 PM	BCl3 valve closed
1/12/2011	12:24:51 PM	PH3 valve closed
1/12/2011	12:24:51 PM	SiCl4 pre valve closed
1/12/2011	12:24:51 PM	SiCl4 post valve closed
1/12/2011	12:24:51 PM	Bubbler valve closed
1/12/2011	12:24:51 PM	Main Vac valve opened
1/12/2011	12:24:51 PM	Bypass valve opened
1/12/2011	12:24:51 PM	Helium MFC set to  0.000000
1/12/2011	12:24:51 PM	H2 MFC set to  0.000000
1/12/2011	12:24:51 PM	BCl3 MFC set to  0.000000
1/12/2011	12:24:51 PM	PHl3 MFC set to  0.000000
1/12/2011	12:24:51 PM	SiCl4 MFC set to  0.000000
1/12/2011	12:24:51 PM	Bypass solenoid MFC set to  0.000000
1/12/2011	12:24:51 PM	Tube furnace set to 0
1/12/2011	12:24:51 PM	Run finished at 12:24 PM
1/12/2011	12:24:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/12/2011	12:25:36 PM	Helium MFC set to  10.000000
1/12/2011	12:25:36 PM	Helium valve opened
1/12/2011	12:53:52 PM	Helium valve closed
1/12/2011	12:55:00 PM	Recipe started at 12:54 PM
1/12/2011	12:55:00 PM	Helium valve closed
1/12/2011	12:55:00 PM	BCl3 valve closed
1/12/2011	12:55:00 PM	PH3 valve closed
1/12/2011	12:55:00 PM	SiCl4 pre valve closed
1/12/2011	12:55:00 PM	SiCl4 post valve closed
1/12/2011	12:55:00 PM	Main Vac valve closed
1/12/2011	12:55:00 PM	Bypass valve closed
1/12/2011	12:55:00 PM	Bubbler valve closed
1/12/2011	12:55:00 PM	H2 valve opened
1/12/2011	12:55:00 PM	Helium MFC set to  0.000000
1/12/2011	12:55:00 PM	H2 MFC set to  500.000000
1/12/2011	12:55:00 PM	BCl3 MFC set to  0.000000
1/12/2011	12:55:00 PM	PHl3 MFC set to  0.000000
1/12/2011	12:55:00 PM	SiCl4 MFC set to  0.000000
1/12/2011	12:55:00 PM	Bypass solenoid MFC set to  0.000000
1/12/2011	12:55:00 PM	Tube furnace set to 0
1/12/2011	12:56:23 PM	Helium valve closed
1/12/2011	12:56:23 PM	BCl3 valve closed
1/12/2011	12:56:23 PM	PH3 valve closed
1/12/2011	12:56:23 PM	SiCl4 pre valve closed
1/12/2011	12:56:23 PM	SiCl4 post valve closed
1/12/2011	12:56:23 PM	Main Vac valve closed
1/12/2011	12:56:23 PM	Bypass valve closed
1/12/2011	12:56:23 PM	H2 valve opened
1/12/2011	12:56:23 PM	Bubbler valve opened
1/12/2011	12:56:23 PM	Helium MFC set to  0.000000
1/12/2011	12:56:23 PM	H2 MFC set to  500.000000
1/12/2011	12:56:23 PM	BCl3 MFC set to  0.000000
1/12/2011	12:56:23 PM	PHl3 MFC set to  0.000000
1/12/2011	12:56:23 PM	SiCl4 MFC set to  0.000000
1/12/2011	12:56:23 PM	Bypass solenoid MFC set to  0.000000
1/12/2011	12:56:23 PM	Tube furnace set to 1000
1/12/2011	1:16:23 PM	Helium valve closed
1/12/2011	1:16:23 PM	BCl3 valve closed
1/12/2011	1:16:23 PM	PH3 valve closed
1/12/2011	1:16:23 PM	Main Vac valve closed
1/12/2011	1:16:23 PM	Bypass valve closed
1/12/2011	1:16:23 PM	H2 valve opened
1/12/2011	1:16:23 PM	SiCl4 pre valve opened
1/12/2011	1:16:23 PM	SiCl4 post valve opened
1/12/2011	1:16:23 PM	Bubbler valve opened
1/12/2011	1:16:23 PM	Helium MFC set to  0.000000
1/12/2011	1:16:23 PM	H2 MFC set to  500.000000
1/12/2011	1:16:23 PM	BCl3 MFC set to  0.000000
1/12/2011	1:16:23 PM	PHl3 MFC set to  0.000000
1/12/2011	1:16:23 PM	SiCl4 MFC set to  50.000000
1/12/2011	1:16:23 PM	Bypass solenoid MFC set to  0.000000
1/12/2011	1:16:23 PM	Tube furnace set to 1000
1/12/2011	1:36:23 PM	H2 valve closed
1/12/2011	1:36:23 PM	BCl3 valve closed
1/12/2011	1:36:23 PM	PH3 valve closed
1/12/2011	1:36:23 PM	SiCl4 pre valve closed
1/12/2011	1:36:23 PM	SiCl4 post valve closed
1/12/2011	1:36:23 PM	Main Vac valve closed
1/12/2011	1:36:23 PM	Bypass valve closed
1/12/2011	1:36:23 PM	Helium valve opened
1/12/2011	1:36:23 PM	Bubbler valve opened
1/12/2011	1:36:23 PM	Helium MFC set to  500.000000
1/12/2011	1:36:23 PM	H2 MFC set to  0.000000
1/12/2011	1:36:23 PM	BCl3 MFC set to  0.000000
1/12/2011	1:36:23 PM	PHl3 MFC set to  0.000000
1/12/2011	1:36:23 PM	SiCl4 MFC set to  0.000000
1/12/2011	1:36:23 PM	Bypass solenoid MFC set to  0.000000
1/12/2011	1:36:24 PM	Tube furnace set to 0
1/12/2011	2:10:13 PM	Helium valve closed
1/12/2011	2:10:13 PM	H2 valve closed
1/12/2011	2:10:13 PM	BCl3 valve closed
1/12/2011	2:10:13 PM	PH3 valve closed
1/12/2011	2:10:13 PM	SiCl4 pre valve closed
1/12/2011	2:10:13 PM	SiCl4 post valve closed
1/12/2011	2:10:13 PM	Main Vac valve closed
1/12/2011	2:10:13 PM	Bypass valve closed
1/12/2011	2:10:13 PM	Bubbler valve closed
1/12/2011	2:10:13 PM	Helium MFC set to  0.000000
1/12/2011	2:10:13 PM	H2 MFC set to  0.000000
1/12/2011	2:10:13 PM	BCl3 MFC set to  0.000000
1/12/2011	2:10:13 PM	PHl3 MFC set to  0.000000
1/12/2011	2:10:13 PM	SiCl4 MFC set to  0.000000
1/12/2011	2:10:13 PM	Bypass solenoid MFC set to  0.000000
1/12/2011	2:10:14 PM	Tube furnace set to 0
1/12/2011	2:10:14 PM	Run finished at 2:10 PM
1/12/2011	2:17:45 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/12/2011	2:17:46 PM	Recipe started at 2:17 PM
1/12/2011	2:17:46 PM	Helium valve closed
1/12/2011	2:17:46 PM	H2 valve closed
1/12/2011	2:17:46 PM	BCl3 valve closed
1/12/2011	2:17:46 PM	PH3 valve closed
1/12/2011	2:17:46 PM	SiCl4 pre valve closed
1/12/2011	2:17:46 PM	SiCl4 post valve closed
1/12/2011	2:17:46 PM	Main Vac valve closed
1/12/2011	2:17:46 PM	Bubbler valve closed
1/12/2011	2:17:46 PM	Bypass valve opened
1/12/2011	2:17:46 PM	Helium MFC set to  0.000000
1/12/2011	2:17:46 PM	H2 MFC set to  0.000000
1/12/2011	2:17:46 PM	BCl3 MFC set to  0.000000
1/12/2011	2:17:46 PM	PHl3 MFC set to  0.000000
1/12/2011	2:17:46 PM	SiCl4 MFC set to  0.000000
1/12/2011	2:17:46 PM	Bypass solenoid MFC set to  0.000000
1/12/2011	2:17:46 PM	Tube furnace set to 0
1/12/2011	2:18:19 PM	Helium valve closed
1/12/2011	2:18:19 PM	H2 valve closed
1/12/2011	2:18:19 PM	BCl3 valve closed
1/12/2011	2:18:19 PM	PH3 valve closed
1/12/2011	2:18:19 PM	SiCl4 pre valve closed
1/12/2011	2:18:19 PM	SiCl4 post valve closed
1/12/2011	2:18:19 PM	Bubbler valve closed
1/12/2011	2:18:19 PM	Main Vac valve opened
1/12/2011	2:18:19 PM	Bypass valve opened
1/12/2011	2:18:19 PM	Helium MFC set to  0.000000
1/12/2011	2:18:19 PM	H2 MFC set to  0.000000
1/12/2011	2:18:19 PM	BCl3 MFC set to  0.000000
1/12/2011	2:18:19 PM	PHl3 MFC set to  0.000000
1/12/2011	2:18:19 PM	SiCl4 MFC set to  0.000000
1/12/2011	2:18:19 PM	Bypass solenoid MFC set to  0.000000
1/12/2011	2:18:19 PM	Tube furnace set to 0
1/12/2011	2:18:19 PM	Run finished at 2:18 PM
1/12/2011	2:18:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/12/2011	2:18:26 PM	Helium MFC set to  10.000000
1/12/2011	2:18:26 PM	Helium valve opened
1/12/2011	2:45:31 PM	Helium valve closed
1/12/2011	4:12:52 PM	Helium valve opened
1/12/2011	4:25:41 PM	Helium valve closed
1/12/2011	4:26:37 PM	Recipe started at 4:26 PM
1/12/2011	4:26:37 PM	Helium valve closed
1/12/2011	4:26:37 PM	BCl3 valve closed
1/12/2011	4:26:37 PM	PH3 valve closed
1/12/2011	4:26:37 PM	SiCl4 pre valve closed
1/12/2011	4:26:37 PM	SiCl4 post valve closed
1/12/2011	4:26:37 PM	Main Vac valve closed
1/12/2011	4:26:37 PM	Bypass valve closed
1/12/2011	4:26:37 PM	Bubbler valve closed
1/12/2011	4:26:37 PM	H2 valve opened
1/12/2011	4:26:37 PM	Helium MFC set to  0.000000
1/12/2011	4:26:37 PM	H2 MFC set to  500.000000
1/12/2011	4:26:37 PM	BCl3 MFC set to  0.000000
1/12/2011	4:26:37 PM	PHl3 MFC set to  0.000000
1/12/2011	4:26:37 PM	SiCl4 MFC set to  0.000000
1/12/2011	4:26:37 PM	Bypass solenoid MFC set to  0.000000
1/12/2011	4:26:37 PM	Tube furnace set to 0
1/12/2011	4:28:01 PM	Helium valve closed
1/12/2011	4:28:01 PM	BCl3 valve closed
1/12/2011	4:28:01 PM	PH3 valve closed
1/12/2011	4:28:01 PM	SiCl4 pre valve closed
1/12/2011	4:28:01 PM	SiCl4 post valve closed
1/12/2011	4:28:01 PM	Main Vac valve closed
1/12/2011	4:28:01 PM	Bypass valve closed
1/12/2011	4:28:01 PM	H2 valve opened
1/12/2011	4:28:01 PM	Bubbler valve opened
1/12/2011	4:28:01 PM	Helium MFC set to  0.000000
1/12/2011	4:28:01 PM	H2 MFC set to  500.000000
1/12/2011	4:28:01 PM	BCl3 MFC set to  0.000000
1/12/2011	4:28:01 PM	PHl3 MFC set to  0.000000
1/12/2011	4:28:01 PM	SiCl4 MFC set to  0.000000
1/12/2011	4:28:01 PM	Bypass solenoid MFC set to  0.000000
1/12/2011	4:28:01 PM	Tube furnace set to 1000
1/12/2011	4:48:01 PM	Helium valve closed
1/12/2011	4:48:01 PM	BCl3 valve closed
1/12/2011	4:48:01 PM	PH3 valve closed
1/12/2011	4:48:01 PM	Main Vac valve closed
1/12/2011	4:48:01 PM	Bypass valve closed
1/12/2011	4:48:01 PM	H2 valve opened
1/12/2011	4:48:01 PM	SiCl4 pre valve opened
1/12/2011	4:48:01 PM	SiCl4 post valve opened
1/12/2011	4:48:01 PM	Bubbler valve opened
1/12/2011	4:48:01 PM	Helium MFC set to  0.000000
1/12/2011	4:48:01 PM	H2 MFC set to  500.000000
1/12/2011	4:48:01 PM	BCl3 MFC set to  0.000000
1/12/2011	4:48:01 PM	PHl3 MFC set to  0.000000
1/12/2011	4:48:01 PM	SiCl4 MFC set to  50.000000
1/12/2011	4:48:01 PM	Bypass solenoid MFC set to  0.000000
1/12/2011	4:48:01 PM	Tube furnace set to 1000
1/12/2011	5:08:01 PM	H2 valve closed
1/12/2011	5:08:01 PM	BCl3 valve closed
1/12/2011	5:08:01 PM	PH3 valve closed
1/12/2011	5:08:01 PM	SiCl4 pre valve closed
1/12/2011	5:08:01 PM	SiCl4 post valve closed
1/12/2011	5:08:01 PM	Main Vac valve closed
1/12/2011	5:08:01 PM	Bypass valve closed
1/12/2011	5:08:01 PM	Helium valve opened
1/12/2011	5:08:01 PM	Bubbler valve opened
1/12/2011	5:08:01 PM	Helium MFC set to  500.000000
1/12/2011	5:08:01 PM	H2 MFC set to  0.000000
1/12/2011	5:08:01 PM	BCl3 MFC set to  0.000000
1/12/2011	5:08:01 PM	PHl3 MFC set to  0.000000
1/12/2011	5:08:01 PM	SiCl4 MFC set to  0.000000
1/12/2011	5:08:01 PM	Bypass solenoid MFC set to  0.000000
1/12/2011	5:08:01 PM	Tube furnace set to 0
1/12/2011	5:44:41 PM	Helium valve closed
1/12/2011	5:44:41 PM	H2 valve closed
1/12/2011	5:44:41 PM	BCl3 valve closed
1/12/2011	5:44:41 PM	PH3 valve closed
1/12/2011	5:44:41 PM	SiCl4 pre valve closed
1/12/2011	5:44:41 PM	SiCl4 post valve closed
1/12/2011	5:44:41 PM	Main Vac valve closed
1/12/2011	5:44:41 PM	Bypass valve closed
1/12/2011	5:44:41 PM	Bubbler valve closed
1/12/2011	5:44:41 PM	Helium MFC set to  0.000000
1/12/2011	5:44:41 PM	H2 MFC set to  0.000000
1/12/2011	5:44:41 PM	BCl3 MFC set to  0.000000
1/12/2011	5:44:41 PM	PHl3 MFC set to  0.000000
1/12/2011	5:44:41 PM	SiCl4 MFC set to  0.000000
1/12/2011	5:44:41 PM	Bypass solenoid MFC set to  0.000000
1/12/2011	5:44:41 PM	Tube furnace set to 0
1/12/2011	5:44:42 PM	Run finished at 5:44 PM
1/12/2011	6:04:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/12/2011	6:04:01 PM	Recipe started at 6:04 PM
1/12/2011	6:04:01 PM	Helium valve closed
1/12/2011	6:04:01 PM	H2 valve closed
1/12/2011	6:04:01 PM	BCl3 valve closed
1/12/2011	6:04:01 PM	PH3 valve closed
1/12/2011	6:04:01 PM	SiCl4 pre valve closed
1/12/2011	6:04:01 PM	SiCl4 post valve closed
1/12/2011	6:04:01 PM	Main Vac valve closed
1/12/2011	6:04:01 PM	Bubbler valve closed
1/12/2011	6:04:01 PM	Bypass valve opened
1/12/2011	6:04:01 PM	Helium MFC set to  0.000000
1/12/2011	6:04:01 PM	H2 MFC set to  0.000000
1/12/2011	6:04:01 PM	BCl3 MFC set to  0.000000
1/12/2011	6:04:01 PM	PHl3 MFC set to  0.000000
1/12/2011	6:04:01 PM	SiCl4 MFC set to  0.000000
1/12/2011	6:04:01 PM	Bypass solenoid MFC set to  0.000000
1/12/2011	6:04:01 PM	Tube furnace set to 0
1/12/2011	6:04:34 PM	Helium valve closed
1/12/2011	6:04:34 PM	H2 valve closed
1/12/2011	6:04:34 PM	BCl3 valve closed
1/12/2011	6:04:34 PM	PH3 valve closed
1/12/2011	6:04:34 PM	SiCl4 pre valve closed
1/12/2011	6:04:34 PM	SiCl4 post valve closed
1/12/2011	6:04:34 PM	Bubbler valve closed
1/12/2011	6:04:34 PM	Main Vac valve opened
1/12/2011	6:04:34 PM	Bypass valve opened
1/12/2011	6:04:34 PM	Helium MFC set to  0.000000
1/12/2011	6:04:34 PM	H2 MFC set to  0.000000
1/12/2011	6:04:34 PM	BCl3 MFC set to  0.000000
1/12/2011	6:04:34 PM	PHl3 MFC set to  0.000000
1/12/2011	6:04:34 PM	SiCl4 MFC set to  0.000000
1/12/2011	6:04:34 PM	Bypass solenoid MFC set to  0.000000
1/12/2011	6:04:34 PM	Tube furnace set to 0
1/12/2011	6:04:34 PM	Run finished at 6:04 PM
1/12/2011	6:04:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/12/2011	6:04:43 PM	Helium MFC set to  10.000000
1/12/2011	6:04:49 PM	Helium valve opened
1/12/2011	6:25:38 PM	Helium valve closed
1/12/2011	6:27:12 PM	Helium valve opened
1/12/2011	6:28:26 PM	Helium valve closed
1/12/2011	6:57:06 PM	Recipe started at 6:57 PM
1/12/2011	6:57:06 PM	Helium valve closed
1/12/2011	6:57:06 PM	BCl3 valve closed
1/12/2011	6:57:06 PM	PH3 valve closed
1/12/2011	6:57:06 PM	SiCl4 pre valve closed
1/12/2011	6:57:06 PM	SiCl4 post valve closed
1/12/2011	6:57:06 PM	Main Vac valve closed
1/12/2011	6:57:06 PM	Bypass valve closed
1/12/2011	6:57:06 PM	Bubbler valve closed
1/12/2011	6:57:06 PM	H2 valve opened
1/12/2011	6:57:06 PM	Helium MFC set to  0.000000
1/12/2011	6:57:06 PM	H2 MFC set to  500.000000
1/12/2011	6:57:06 PM	BCl3 MFC set to  0.000000
1/12/2011	6:57:06 PM	PHl3 MFC set to  0.000000
1/12/2011	6:57:06 PM	SiCl4 MFC set to  0.000000
1/12/2011	6:57:06 PM	Bypass solenoid MFC set to  0.000000
1/12/2011	6:57:07 PM	Tube furnace set to 0
1/12/2011	6:58:29 PM	Helium valve closed
1/12/2011	6:58:29 PM	BCl3 valve closed
1/12/2011	6:58:29 PM	PH3 valve closed
1/12/2011	6:58:29 PM	SiCl4 pre valve closed
1/12/2011	6:58:29 PM	SiCl4 post valve closed
1/12/2011	6:58:29 PM	Main Vac valve closed
1/12/2011	6:58:29 PM	Bypass valve closed
1/12/2011	6:58:29 PM	H2 valve opened
1/12/2011	6:58:29 PM	Bubbler valve opened
1/12/2011	6:58:29 PM	Helium MFC set to  0.000000
1/12/2011	6:58:29 PM	H2 MFC set to  500.000000
1/12/2011	6:58:29 PM	BCl3 MFC set to  0.000000
1/12/2011	6:58:29 PM	PHl3 MFC set to  0.000000
1/12/2011	6:58:29 PM	SiCl4 MFC set to  0.000000
1/12/2011	6:58:29 PM	Bypass solenoid MFC set to  0.000000
1/12/2011	6:58:29 PM	Tube furnace set to 1000
1/12/2011	7:18:29 PM	Helium valve closed
1/12/2011	7:18:29 PM	BCl3 valve closed
1/12/2011	7:18:29 PM	PH3 valve closed
1/12/2011	7:18:29 PM	Main Vac valve closed
1/12/2011	7:18:29 PM	Bypass valve closed
1/12/2011	7:18:29 PM	H2 valve opened
1/12/2011	7:18:29 PM	SiCl4 pre valve opened
1/12/2011	7:18:29 PM	SiCl4 post valve opened
1/12/2011	7:18:29 PM	Bubbler valve opened
1/12/2011	7:18:29 PM	Helium MFC set to  0.000000
1/12/2011	7:18:29 PM	H2 MFC set to  500.000000
1/12/2011	7:18:29 PM	BCl3 MFC set to  0.000000
1/12/2011	7:18:29 PM	PHl3 MFC set to  0.000000
1/12/2011	7:18:29 PM	SiCl4 MFC set to  50.000000
1/12/2011	7:18:29 PM	Bypass solenoid MFC set to  0.000000
1/12/2011	7:18:29 PM	Tube furnace set to 1000
1/12/2011	7:38:29 PM	H2 valve closed
1/12/2011	7:38:29 PM	BCl3 valve closed
1/12/2011	7:38:29 PM	PH3 valve closed
1/12/2011	7:38:29 PM	SiCl4 pre valve closed
1/12/2011	7:38:29 PM	SiCl4 post valve closed
1/12/2011	7:38:29 PM	Main Vac valve closed
1/12/2011	7:38:29 PM	Bypass valve closed
1/12/2011	7:38:29 PM	Helium valve opened
1/12/2011	7:38:29 PM	Bubbler valve opened
1/12/2011	7:38:29 PM	Helium MFC set to  500.000000
1/12/2011	7:38:29 PM	H2 MFC set to  0.000000
1/12/2011	7:38:29 PM	BCl3 MFC set to  0.000000
1/12/2011	7:38:29 PM	PHl3 MFC set to  0.000000
1/12/2011	7:38:29 PM	SiCl4 MFC set to  0.000000
1/12/2011	7:38:29 PM	Bypass solenoid MFC set to  0.000000
1/12/2011	7:38:29 PM	Tube furnace set to 0
1/12/2011	8:15:09 PM	Helium valve closed
1/12/2011	8:15:09 PM	H2 valve closed
1/12/2011	8:15:09 PM	BCl3 valve closed
1/12/2011	8:15:09 PM	PH3 valve closed
1/12/2011	8:15:09 PM	SiCl4 pre valve closed
1/12/2011	8:15:09 PM	SiCl4 post valve closed
1/12/2011	8:15:09 PM	Main Vac valve closed
1/12/2011	8:15:09 PM	Bypass valve closed
1/12/2011	8:15:09 PM	Bubbler valve closed
1/12/2011	8:15:09 PM	Helium MFC set to  0.000000
1/12/2011	8:15:09 PM	H2 MFC set to  0.000000
1/12/2011	8:15:09 PM	BCl3 MFC set to  0.000000
1/12/2011	8:15:09 PM	PHl3 MFC set to  0.000000
1/12/2011	8:15:09 PM	SiCl4 MFC set to  0.000000
1/12/2011	8:15:09 PM	Bypass solenoid MFC set to  0.000000
1/12/2011	8:15:09 PM	Tube furnace set to 0
1/12/2011	8:15:10 PM	Run finished at 8:15 PM
1/12/2011	10:00:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/12/2011	10:00:21 PM	Recipe started at 10:00 PM
1/12/2011	10:00:21 PM	Helium valve closed
1/12/2011	10:00:21 PM	H2 valve closed
1/12/2011	10:00:21 PM	BCl3 valve closed
1/12/2011	10:00:21 PM	PH3 valve closed
1/12/2011	10:00:21 PM	SiCl4 pre valve closed
1/12/2011	10:00:21 PM	SiCl4 post valve closed
1/12/2011	10:00:21 PM	Main Vac valve closed
1/12/2011	10:00:21 PM	Bubbler valve closed
1/12/2011	10:00:21 PM	Bypass valve opened
1/12/2011	10:00:21 PM	Helium MFC set to  0.000000
1/12/2011	10:00:21 PM	H2 MFC set to  0.000000
1/12/2011	10:00:21 PM	BCl3 MFC set to  0.000000
1/12/2011	10:00:21 PM	PHl3 MFC set to  0.000000
1/12/2011	10:00:21 PM	SiCl4 MFC set to  0.000000
1/12/2011	10:00:21 PM	Bypass solenoid MFC set to  0.000000
1/12/2011	10:00:21 PM	Tube furnace set to 0
1/12/2011	10:00:54 PM	Helium valve closed
1/12/2011	10:00:54 PM	H2 valve closed
1/12/2011	10:00:54 PM	BCl3 valve closed
1/12/2011	10:00:54 PM	PH3 valve closed
1/12/2011	10:00:54 PM	SiCl4 pre valve closed
1/12/2011	10:00:54 PM	SiCl4 post valve closed
1/12/2011	10:00:54 PM	Bubbler valve closed
1/12/2011	10:00:54 PM	Main Vac valve opened
1/12/2011	10:00:54 PM	Bypass valve opened
1/12/2011	10:00:54 PM	Helium MFC set to  0.000000
1/12/2011	10:00:54 PM	H2 MFC set to  0.000000
1/12/2011	10:00:54 PM	BCl3 MFC set to  0.000000
1/12/2011	10:00:54 PM	PHl3 MFC set to  0.000000
1/12/2011	10:00:54 PM	SiCl4 MFC set to  0.000000
1/12/2011	10:00:54 PM	Bypass solenoid MFC set to  0.000000
1/12/2011	10:00:54 PM	Tube furnace set to 0
1/12/2011	10:00:55 PM	Run finished at 10:00 PM
1/12/2011	10:00:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/12/2011	10:05:52 PM	Helium MFC set to  20.000000
1/12/2011	10:05:53 PM	Helium valve opened
1/12/2011	10:22:25 PM	Helium valve closed
1/12/2011	11:01:02 PM	Helium valve opened
1/12/2011	11:02:09 PM	Helium MFC set to  100.000000
1/12/2011	11:03:05 PM	Helium valve closed
1/12/2011	11:03:09 PM	Helium MFC set to  500.000000
1/12/2011	11:03:10 PM	Helium valve opened
1/12/2011	11:06:46 PM	Helium valve closed
1/12/2011	11:07:42 PM	Helium valve opened
1/12/2011	11:14:02 PM	Helium valve closed
1/12/2011	11:14:37 PM	Helium valve opened
1/12/2011	11:21:57 PM	Helium valve closed
1/12/2011	11:22:22 PM	Helium valve opened
1/12/2011	11:30:03 PM	Helium valve closed
1/12/2011	11:30:22 PM	Helium MFC set to  40.000000
1/12/2011	11:30:23 PM	Helium valve opened
1/12/2011	11:30:45 PM	Helium valve closed
1/12/2011	11:31:47 PM	Recipe started at 11:31 PM
1/12/2011	11:31:47 PM	Helium valve closed
1/12/2011	11:31:47 PM	BCl3 valve closed
1/12/2011	11:31:47 PM	PH3 valve closed
1/12/2011	11:31:47 PM	SiCl4 pre valve closed
1/12/2011	11:31:47 PM	SiCl4 post valve closed
1/12/2011	11:31:47 PM	Main Vac valve closed
1/12/2011	11:31:47 PM	Bypass valve closed
1/12/2011	11:31:47 PM	Bubbler valve closed
1/12/2011	11:31:47 PM	H2 valve opened
1/12/2011	11:31:47 PM	Helium MFC set to  0.000000
1/12/2011	11:31:47 PM	H2 MFC set to  500.000000
1/12/2011	11:31:47 PM	BCl3 MFC set to  0.000000
1/12/2011	11:31:47 PM	PHl3 MFC set to  0.000000
1/12/2011	11:31:47 PM	SiCl4 MFC set to  0.000000
1/12/2011	11:31:47 PM	Bypass solenoid MFC set to  0.000000
1/12/2011	11:31:47 PM	Tube furnace set to 0
1/12/2011	11:33:11 PM	Helium valve closed
1/12/2011	11:33:11 PM	BCl3 valve closed
1/12/2011	11:33:11 PM	PH3 valve closed
1/12/2011	11:33:11 PM	SiCl4 pre valve closed
1/12/2011	11:33:11 PM	SiCl4 post valve closed
1/12/2011	11:33:11 PM	Main Vac valve closed
1/12/2011	11:33:11 PM	Bypass valve closed
1/12/2011	11:33:11 PM	H2 valve opened
1/12/2011	11:33:11 PM	Bubbler valve opened
1/12/2011	11:33:11 PM	Helium MFC set to  0.000000
1/12/2011	11:33:11 PM	H2 MFC set to  500.000000
1/12/2011	11:33:11 PM	BCl3 MFC set to  0.000000
1/12/2011	11:33:11 PM	PHl3 MFC set to  0.000000
1/12/2011	11:33:11 PM	SiCl4 MFC set to  0.000000
1/12/2011	11:33:11 PM	Bypass solenoid MFC set to  0.000000
1/12/2011	11:33:11 PM	Tube furnace set to 1000
1/12/2011	11:53:12 PM	Helium valve closed
1/12/2011	11:53:12 PM	BCl3 valve closed
1/12/2011	11:53:12 PM	PH3 valve closed
1/12/2011	11:53:12 PM	Main Vac valve closed
1/12/2011	11:53:12 PM	Bypass valve closed
1/12/2011	11:53:12 PM	H2 valve opened
1/12/2011	11:53:12 PM	SiCl4 pre valve opened
1/12/2011	11:53:12 PM	SiCl4 post valve opened
1/12/2011	11:53:12 PM	Bubbler valve opened
1/12/2011	11:53:12 PM	Helium MFC set to  0.000000
1/12/2011	11:53:12 PM	H2 MFC set to  500.000000
1/12/2011	11:53:12 PM	BCl3 MFC set to  0.000000
1/12/2011	11:53:12 PM	PHl3 MFC set to  0.000000
1/12/2011	11:53:12 PM	SiCl4 MFC set to  50.000000
1/12/2011	11:53:12 PM	Bypass solenoid MFC set to  0.000000
1/12/2011	11:53:12 PM	Tube furnace set to 1000
